Nestor Zaluzec - A Transmission X-ray Detector for Nano-Particle Analysis
Have your Pi and EDS too:
A Transmission X-ray Detector for Nano-Particle Analysis
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Nestor J. Zaluzec |
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Abstract One of the factors which governs the ability to measure an x-ray signal is the detector geometrical collection efficiency and is typically defined in terms of the collection solid angle . For EDS systems interfaced to a scanning electron microscope (SEM) values can range from < 0.005 to ~0.1 sR, while in transmission or scanning-transmission electron microscopes (TEM/STEMs) values of up to ~ 0.1- 0.3 sR have become routine. To improve this situation specifically for nano-particle characterization, a prototype 42.5 mm2 SDD x-ray detector which operates in a novel transmission configuration has built and has been interfaced to the column of a FEG-ESEM. The detector is enclosed in a stainless steel housing (0.75" in diameter), while the detector crystal is protected from electron irradiation by using a 12.5 µm thick Be window. In this geometry, nano-particle specimens for analysis are supported on TEM grids held in a custom built, Be shielded stage, which can be adjusted using the existing SEM stage translation mechanisms. The SDD detector is inserted beneath the specimen by means of a standard linear insertion mechanism interfaced to a side entry port of the microscope. At closest distance tested the detector solid angle just exceeds 3.14 sR. Research continues to refine the performance and solid angle of this configuration, as well as to consider alternative configurations for use in TEM geometries.
Biography Nestor received his B.S. degree in Physics at Illinois Institute of Technology in Chicago, and his PhD in 1978 from the Department of Metallurgy at the University of Illinois Urbana-Champaign. |
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